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半导体设备最佳伙伴
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W74 Tungsten
CVD Tungsten Introduction
(W74) Tungsten,High melting point (3422℃)
Radiation resistant、Good electrical conductivity and thermal conductivity. The high-temperature application will be good performance :
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Implant – source head
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E Gung – crucible
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PVD – Target
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Furnace - filament
CVD is Chemical reduction high-quality Tungsten by H2 and WF6. Tungsten by CVD process provides good performance more than (Powder Metallurgy).
CVD-W Benefit
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To recover 94Mo++ @CIS white pixel issue
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Decrease PFG Filament Fe/Ni/Cr 22%
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Parts life time improve 10%~25%up
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Environmental protection & Energy saving proposal Cooperation
Density Compare
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